Home : Book details

Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications free ebook download

Category:
Chemistry

Views: 96
Likes: 166

Catalogue

Author(s):	Ivo Utke, Stanislav Moshkalev, Phillip Russell

Date:	2012	Format:	PDF	Language:	English	ISBN/ASIN:	0199734216
Pages:	1	OCR:		Quality:		ISBN13:
Uploader:	alex21s	Upload Date:	3/19/2020 12:51:46 PM

To download click on link in the Links Table below

Description: Click to see full description

Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices.

The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined.

Chapters include tutorials describing fundamental aspects of the interaction of beams (FIB/FEB) with surfaces, nanostructures and adsorbed molecules  electron and ion beam chemistries  basic theory, design and configuration of equipment  simulations of processes  basic solutions for nanoprototyping. Emerging technologies as processing by cluster beams are also discussed.

In addition, the book considers numerous applications of these techniques (milling, etching, deposition) for nanolithography, nanofabrication and characterization, involving different nanostructured materials and devices. Its main focus is on practical details of using focused ion and electron beams with gas assistance (deposition and etching) and without gas assistance (milling/cutting) for fabrication of devices from the fields of nanoelectronics, nanophotonics, nanomagnetics, functionalized scanning probe tips, nanosensors and other types of NEMS (nanoelectromechanical systems). Special attention is given to strategies designed to overcome limitations of the techniques (e.g., due to damaging produced by energetic ions interacting with matter), particularly those involving multi-step processes and multi-layer materials.

Through its thorough demonstration of fundamental concepts and its presentation of a wide range of technologies developed for specific applications, this volume is ideal for researches from many different disciplines, as well as engineers and professors in nanotechnology and nanoscience.

My nickname - interes

Links Table

	Title	Link	Password	Size (MB)	Thank to	Inform Admin
2729047	Book	https://tezfiles.com/file/b0c11024d8968...		11.00	alex21s

Tags: Applications Beams Electron Focused Nanofabrication Principles Using

Title	Link	Password	Size	Reason

Those who downloaded this book also downloaded the following books:

Comments

New comment:

Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications free ebook download

Category: Chemistry

Description: Click to see full description

Category:
Chemistry