Capacitive Silicon Resonators : Performance Enhancement Methods free ebook download.

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Capacitive Silicon Resonators : Performance Enhancement Methods free ebook download

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Electrical Engineering

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Catalogue

Author(s):	Capacitive Silicon Resonators : Performance Enhancement Methods

Date:	2020	Format:	PDF	Language:	English	ISBN/ASIN:	0367217767
Pages:	1	OCR:		Quality:		ISBN13:
Uploader:	alex21s	Upload Date:	8/9/2019 6:24:23 PM

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Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology.

Features

- Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators
- Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator.
- Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor.
- Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body.
- Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.

Links Table

	Title	Link	Password	Size (MB)	Thank to	Inform Admin
2557862	Book	http://k2s.cc/file/d42ffc5d05a45...		26.00	alex21s

Tags: Capacitive Enhancement Methods Performance Resonators Silicon

Title	Link	Password	Size	Reason

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