Advanced MEMS/NEMS Fabrication and Sensors free ebook download.

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Advanced MEMS/NEMS Fabrication and Sensors free ebook download

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Catalogue

Author(s):	Zhuoqing Yang

Date:	2021	Format:	7z	Language:	English	ISBN/ASIN:	3030797481
Pages:	318	OCR:		Quality:		ISBN13:
Uploader:	stirkout	Upload Date:	10/16/2021 10:12:23 PM

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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development.
Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors 
Covers a broad spectrum of sensor applications 
Written by leading experts in the field.

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3043219	Book	https://nitro.download/view/B98D0FFFF36B...		0.00	stirkout

Tags: Advanced Fabrication MEMS NEMS Sensors

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